1) XeO₃ can be produced by hydrolysis of XeF₄ and XeF₆ under controlled pH of the medium in which reaction is taking place as shown below:

6XeF₄ + 12H₂O → 4Xe + 2XeO₃ + 24HF + 3O₂

XeF₆ + 3H₂O → XeO₃ + 6HF

2) XeOF₄ can be obtained on partial hydrolysis of XeF₆ as shown below:

XeF₆ + H₂O → XeOF₄ + 2HF